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Grazing Interferometer

The principle of measurement is based on interferometry by grazing incidence.
Flatness measurements of polished as well as non-reflective, rougher surfaces
Flat Surfaces that is not measurable with traditional interferometers.
An air gap between prism and part ensures no physical damage of the part to be inspected.
The sensitivity can be selected from four calibrated settings. (0.5, 1, 2, and 4um/fringe)
Visual evaluation of light bands on a Monitor/Computer
Quick inspection of lapped parts with specially designed platform that could be pulled and pushed by replacing the test part.
Measurement can be saved and thus be evaluated and printed out at a later time.

Specifications:

Repeatability	Better than 0.03 μm
Resolution	0.03 μm
Accuracy	0.1-0.4 μm+ 2% of the measured value
Calibrated Sensitivities	0.5, 1.0, 2.0 & 4.0 μm per fringe
Flatness of Reference surface of Prism	0.06 μm
Dynamic Range	> 100 μm
Part Range	50 mm - 100 mm
Measurement Time	5 seconds (typical)
Surfaces	Ground, lapped or polished
Interferometer Housing	65 cm x 65 cm x 35 cm
Weight	< 40 kg